AP14PAT, Pneumatic Actuation Pressure Regulator, Intermediate Flow (Tied-diaphragm)

AP14PAT, Pneumatic Actuation Pressure Regulator, Intermediate Flow (Tied-diaphragm) Show Description

Series AP is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.

  • Actuation control pressure isolated from process gas by two seals
  • Body material: 316L SS secondary remelt
  • High inlet pressure type:  Standard Max. 2300 psig (15.9 MPa); HR Max. 3000 psig (20.7 MPa 
  • Flow capacity: Standard to 400 slpm
  • Ni-Cr-Mo alloy internals standard
  • 100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa) control pressure or less
Configuration Options
  
 

Highlight the number above and click Ctrl+C (⌘+C) to copy.

Copy Configuration Number

Product Options

Select Product Options
Select values from the drop down lists or make appropriate selections to configure the part number.
Material Configuration Status
Surface Finish Configuration Status
Ports Configuration Status
Connections, Inlet Configuration Status
Connections, Outlet Configuration Status
Gauge Port, Inlet Configuration Status
Gauge Port, Outlet Configuration Status
Pressure Gauge Unit Configuration Status
Seat Material Configuration Status
Option Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.

Downloads

The part number needs to be complete in order to view/download CAD Models.

Model does not exist, please email cad@smcusa.com with the complete part number, CAD file format and version required.

CAD Downloads

Download CAD File

View CAD Models

View 3D Model View 2D Model

Product Catalog

Series Catalog