Angle and In-line Valves – XL

XL*, High Vacuum Angle Valve, Air Operated

XL*, High Vacuum Angle Valve, Air Operated

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

  • Light weight and compact
  • Uniform baking temperature
  • High fluorine resistance
  • Low outgassing
  • Little heavy metal contamination

XLH, High Vacuum Manual Angle Valve, Bellows Seal

XLH, High Vacuum Manual Angle Valve, Bellows Seal

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

  • High vacuum angle valve
  • Type: manual, bellows seal
  • Flange size: 16 ~ 50
  • Heater type: H1 (80°C), H2 (100°C), H3 (120°C)
  • Auto switches not available

XL*V, High Vacuum Angle Valves, Air Operated w/Solenoid Valve

XL*V, High Vacuum Angle Valves, Air Operated w/Solenoid Valve

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

  • Light weight and compact
  • Uniform baking temperature
  • High fluorine resistance
  • Low outgassing
  • Little heavy metal contamination

XLS, High Vacuum Angle Valve, Electromagnetic Type,  Bellows Balance

XLS, High Vacuum Angle Valve, Electromagnetic Type, Bellows Balance

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

  • Particulates are reduced because there are no sliding metal parts
  • Pressure balance mechanism allows unrestricted exhaust direction
  • Can be used in portable equipment since air for drive is not required
  • A control power supply circuit for solenoid valve drive has been made standard

XL*Q, High Vacuum Angle Valve, Aluminum One-touch Connection & Release

XL*Q, High Vacuum Angle Valve, Aluminum One-touch Connection & Release

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

  • One-touch connection & release, requires no tools
  • Lightweight & compact
  • Auto switch capable
  • XLAQ: single acting, normally closed, bellows seal
  • XLAQ: flange sizes are 16, 25, 40, 50
  • XLDQ: 2-step control, single acting
  • XLDQ: flange sizes are 40, 50

XLA-2, Aluminium High Vacuum Angle Valve, Normally Closed/Bellows Seal

XLA-2, Aluminium High Vacuum Angle Valve, Normally Closed/Bellows Seal

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

  • Aluminium bodied
  • Uniform baking temperature
  • Minimal outgassing
  • High corrosion resistance to fluorine gas
  • Lightweight, Compact
  • Minimal contamination from heavy metals

XLC-2, Aluminum High Vacuum Angle Valve, Double Acting, Bellows Seal

XLC-2, Aluminum High Vacuum Angle Valve, Double Acting, Bellows Seal

XLC-2 is a double acting high vacuum angle valve with a bellows seal for the shaft. The XL*-2 family shares common features with all series members. Bodies are made of aluminum for lightweight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion. A low sputtering yield and the absence of heavy metals avoid wafer contamination.

  • Air pressure applied to pilot port shifts piston-coupled valve
  • Replaceable bellows reduces maintenance cost and waste material
  • Additional maintenance parts available to extend useful life of valve
  • Standard FKM seals, plus 8 additional seal compound options
  • Auto switches mountable from 4 directions
  • Optional 100°C and 150°C heaters (UL compliant lead wire)

XLF-2, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal

XLF-2, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal

XLF-2 is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal. The XL*-2 family shares common features with all series members. Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion. A low sputtering yield and the absence of heavy metals avoid wafer contamination

  • Air pressure applied to pilot port shifts opens piston-coupled valve
  • Numerous maintenance parts available to extend useful life of valve
  • Standard FKM seals, plus 8 additional seal compound options
  • Auto switches mountable from 4-directions
  • Optional 100°C and 150°C heaters (UL compliant lead wire)

XLG-2, Aluminum High Vacuum Angle Valve, Double Acting, O-ring Seal

XLG-2, Aluminum High Vacuum Angle Valve, Double Acting, O-ring Seal

XLG-2 is a double acting high vacuum angle valve with an O-ring shaft seal. The XL*-2 family shares common features with all series members. Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion. A low sputtering yield and the absence of heavy metals avoid wafer contamination

  • Air pressure applied to pilot port shifts piston-coupled valve
  • Numerous maintenance parts available to extend useful life of valve
  • Standard FKM seals, plus 8 additional seal compound options
  • Auto switches mountable from 4 directions
  • Optional 100°C and 150°C heaters (UL compliant lead wire)