Slit Valves – XGT

XGT, High Vacuum Slit Valve

XGT, High Vacuum Slit Valve

Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.

  • Gasket with wiper: protection of bellows
  • Rubber cushions for opening and closing:  impact absorption
  • Enc lock mechanism
  • Service life of two million cycles