Pneumatic Adjust – AP

AP10PA, Pneumatic Actuation Pressure Regulator, Low Flow

AP10PA, Pneumatic Actuation Pressure Regulator, Low Flow

Series AP is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.

  • Actuation control pressure isolated from process gas by two seals
  • Body material: 316L SS secondary remelt
  • High inlet pressure type: Max. 3500 psig (24.1 MPa)
  • Flow capacity: Standard to 30 slpm, HF (Option) to 120 slpm
  • Ni-Cr-Mo alloy internals available for corrosion resistance
  • 100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa) control pressure or less

AP15PA, Pneumatic Actuation Pressure Regulator, Low Flow (Tied-diaphragm)

AP15PA, Pneumatic Actuation Pressure Regulator, Low Flow (Tied-diaphragm)

Series AP is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.

  • Actuation control pressure isolated from process gas by two seals
  • Body material: 316L SS secondary remelt
  • High inlet pressure type: Max. 3500 psig (24.1 MPa)
  • Flow capacity: Standard to 30 slpm
  • Ni-Cr-Mo alloy internals available for corrosion resistance
  • 100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa) control pressure or less

AP14PAT, Pneumatic Actuation Pressure Regulator, Intermediate Flow (Tied-diaphragm)

AP14PAT, Pneumatic Actuation Pressure Regulator, Intermediate Flow (Tied-diaphragm)

Series AP is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.

  • Actuation control pressure isolated from process gas by two seals
  • Body material: 316L SS secondary remelt
  • High inlet pressure type:  Standard Max. 2300 psig (15.9 MPa); HR Max. 3000 psig (20.7 MPa 
  • Flow capacity: Standard to 400 slpm
  • Ni-Cr-Mo alloy internals standard
  • 100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa) control pressure or less

AP12PA, Pneumatic Actuation Pressure Regulator, High Flow (Tied-diaphragm)

AP12PA, Pneumatic Actuation Pressure Regulator, High Flow (Tied-diaphragm)

Series AP is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.

  • Actuation control pressure isolated from process gas by two seals
  • Body material: 316L SS secondary remelt
  • High inlet pressure type: Standard Max. 1700 psig (11.7 MPa); HR Max. 3000 psig (20.7 MPa
  • Flow capacity: Standard to 800 slpm
  • Ni-Cr-Mo alloy internals available for corrosion resistance
  • 100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa) control pressure or less