Temperature Control – High Technology Chiller

HRZ, High Performance Specialty Chiller, Fluorinated Coolant Type

HRZ, High Performance Specialty Chiller, Fluorinated Coolant Type

HRZ recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature ±0.1°C. All models offer compatibility with R404A and R134a refrigerants. 4 cooling capacities are available. This model is compatible with fluorinated coolants including Fluorinert™ and GALDEN®.

  • Cooling capacities: 1kW, 2kW, 4kW, 8kW
  • Temperature range setting: -20 to 40°C, 20 to 90°C, -20 to 90°C
  • Temperature stability: ±0.1°C
  • Power supply requirement: 3-phase 200 VAC / 50Hz or 3-phase 200~208 VAC / 60Hz
  • Standards: CE, UL, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)
  • Circulating fluid: Fluorinert™ or GALDEN® (see catalog for compatibility)

HRZ, High Performance Specialty Chiller, Ethylene Glycol Coolant Type

HRZ, High Performance Specialty Chiller, Ethylene Glycol Coolant Type

HRZ recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature ±0.1°C. All models offer compatibility with R404A and R134a refrigerants. 4 cooling capacities are available. This model requires a 60% ethylene glycol aqueous solution.

  • Same specifications as fluorinated coolant type EXCEPT,
  • Circulating fluid: 60% ethylene glycol solution

HRZ, High Performance Specialty Chiller, Deionized Water Coolant Type

HRZ, High Performance Specialty Chiller, Deionized Water Coolant Type

HRZ recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature ±0.1°C. All models offer compatibility with R404A and R134a refrigerants. 4 cooling capacities are available. This model requires clear or deionized water as a coolant.

  • Same specifications as fluorinated coolant type EXCEPT,
  • Temperature range setting: -10 to 40°C
  • Circulating fluid: clear or deionized water

HRZ, High Performance Specialty Chiller, Double Inverter Type

HRZ, High Performance Specialty Chiller, Double Inverter Type

HRZ recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature ±0.1°C. This model includes an energy-saving inverter compressor and inverter pump, achieving lower power consumption and requiring a lower average flow rate of facility water for refrigerant heat extraction. 10 kW of cooling capacity is available at 20°C coolant set point. Multiple coolant types can be selected for this model.

  • Cooling capacity: 10kW
  • Temperature range setting:
    -20 to 90°C (fluorinated or ethylene glycol coolants)
    -10 to 60°C (clear or deionized water coolant)
  • Temperature stability: ±0.1°C
  • Power supply requirement: 3-phase 200 VAC / 50Hz or 3-phase 200~208 VAC / 60Hz
  • Standards: CE, UL, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)