XGT, High Vacuum Slit Valve

XGT, High Vacuum Slit Valve Show Description

Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.

  • Gasket with wiper: protection of bellows
  • Rubber cushions for opening and closing:  impact absorption
  • Enc lock mechanism
  • Service life of two million cycles
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Valve Size Configuration Status
Valve Type Configuration Status
Opening Window Size Configuration Status
Gate O-ring Material Configuration Status
Auto Switch & Connector Configuration Status
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  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.

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