XL*, High Vacuum Angle Valve, Air Operated

XL*, High Vacuum Angle Valve, Air Operated Show Description

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

  • Light weight and compact
  • Uniform baking temperature
  • High fluorine resistance
  • Low outgassing
  • Little heavy metal contamination
Configuration Options

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Product Options

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Select values from the drop down lists or make appropriate selections to configure the part number.
Valve Type Configuration Status
Flange Size Configuration Status
Flange Type Configuration Status
Port Direction Configuration Status
Temperature Configuration Status
Flange Size Specification Configuration Status
Auto Switch Configuration Status
Lead Wire Configuration Status
Number Configuration Status
Non-standard Indicator Configuration Status
Body Surface Treatment Configuration Status
Seal Material Configuration Status
Seal Replacement Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.


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