XLS, High Vacuum Angle Valve, Electromagnetic Type, Bellows Balance

XLS, High Vacuum Angle Valve, Electromagnetic Type,  Bellows Balance Show Description

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

  • Particulates are reduced because there are no sliding metal parts
  • Pressure balance mechanism allows unrestricted exhaust direction
  • Can be used in portable equipment since air for drive is not required
  • A control power supply circuit for solenoid valve drive has been made standard
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Valve Size Configuration Status
Control Power Supply Configuration Status
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Electrical Entry Configuration Status
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  • Red conflict with another selected option value.
  • Amber are not recommended.

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