Temperature Control
Product Overview
Chillers are products that control the
temperature of heat sources in customers' devices and equipment
using temperature-controlled circulating fluid. Maintaining a
fixed temperature can improve the quality, reliability and service
life of devices or equipment.
SMC's line of temperature control
units utilize best-in-class technologies to accomplish the exact
range of temperature ranges and temperature stability desired by
our customers.
With a wide range of applications from
optimizing the throughput on a laser machine to improving the end
product in injection molding to preventing distortion through the
evaporation of chemicals in the semiconductor industry, SMC
chillers and thermo-con units have proven performance.
Technical Specifications
|
Compact Thermo-chiller
|
Series/
CAD |
Set
temperature
range |
Cooling
capacity |
Temperature
stability |
Cooling
method |
Circulating liquid |
| HRS |
5 to 40°C
(41 to 104° F) |
1300W
1900W
2400W
5100W |
±0.1° C
|
Air-cooled
refrigeration/
Water-cooled
refrigeration |
Clear water, Deionized water, Ethylene glycol
aqueous solution
|
| Features |
- Air-cooled models provide cooling water wherever needed thanks
to easy mounting and easy operation.
- Proven performance with a wide range of applications such as
lasers/analysis equipment/LCD manufacturing equipment/analytical
instrumentation, etc.
- Compact W377mm x H615mm x D500mm, 40kg
- Timer operation function
- Low level in tank detecting function
- Power failure auto-restart function
- Anti-freezing function
- Self diagnosis function
- Single-phase 200 to 230VAC, single-phase 100 to 115VAC
- Conforms to UL specifications, CE marking.
|
|
Economy Refrigerated
Thermo-cooler
|
Series/
CAD |
Set
temperature
range |
Cooling
capacity |
Temperature
stability |
Cooling
method |
Circulating liquid |
| HRG |
5 to 35°C
(41 to 95° F) |
10 to 15 kW |
±1.0° C/
±0.5° C |
Air-cooled
refrigeration/
Water-cooled
refrigeration |
Clear water,
Ethylene glycol
aqueous solution |
| Features |
- Air-cooled models provide cooling water wherever needed thanks
to easy mounting and easy operation.
- Proven performance with a wide range of applications such as
lasers/analysis equipment/LCD manufacturing equipment/mold
temperature regulators, etc.
|
|
High-performance Refrigerated
Thermo-chiller
|
Series/
CAD |
Set
temperature
range |
Cooling
capacity |
Temperature
stability |
Cooling
method |
Circulating liquid |
| HRZ |
-20 to 40°C
(-4 to 104° F) |
1 to 15 kW |
±0.1° C |
Water-cooled
refrigeration |
Fluorinated liquid,
Clear water,
Deionized water,
Ethylene glycol
aqueous solution |
|
20 to 90°C
(68 to 194° F) |
|
-20 to 90°C
(-4 to 194° F) |
| Features |
- Proven performance with semiconductor process equipment, with a
wide range of features such as high temperature stability, wide
temperature range, failure testing, external signal.
- All models conform to safety standards.
- Conforms to UL and SEMI specifications, CE marking.
|
|
|
|
|
High Performance Chiller (Built-in
Inverter)
|
Series/
CAD |
Set
temperature
range |
Cooling
capacity |
Temperature
stability |
Cooling
method |
Circulating liquid |
| HRZ-010-WS |
-20 to 90°C
(-4 to 194° F) |
1.8 to 10 kW |
±0.1° C |
Water-cooled
refrigeration |
Fluorinated liquid,
Clear water,
Deionized water,
Ethylene glycol
aqueous solution |
| Features |
- In addition to the state-of-the-art functions of the HRZ
series, these models employ a DC inverter compressor to achieve
better energy efficiency.
- Wide temperature range and cooling capacity range covered by
one unit
- Suited to the short innovation cycle of semiconductor
equipment, and capable of responding flexibly to changes in the
process conditions.
- Conforms to UL and SEMI specifications, CE marking.
|
|
|
Double Inverter Refrigerated Dual
Thermo Chiller
|
| Series/CAD |
Set
temperature
range |
Cooling
capacity |
Temperature
stability |
Cooling
method |
Circulating liquid |
| HRZD |
-30 to 90°C
(-22 to 194° F) |
9.5kW x 2 |
±0.1° C |
Water-cooled
refrigeration |
Fluorinated liquid |
| Features |
- Temperature for two systems can be controlled separately by one
chiller.
- Double inverter type : Substantially more energy is saved by
using a DC inverter refrigerator and inverter pump.
- Space saving : Footprint reduced by 23 %
- Reduced wiring, piping and labor : Single power cable, single
facility-water piping system
- Conforms to CE marking.
|
|
|
High Performance Water-cooled Thermo
Chiller
|
Series/
CAD |
Set
temperature
range |
Cooling
capacity |
Temperature
stability |
Cooling
method |
Circulating liquid |
| HRW |
20 to 90°C
(68 to 194° F) |
2 to 30 kW |
±0.3° C |
Water-cooled
refrigeration |
Fluorinated liquid,
Clear water,
Deionized water,
Ethylene glycol
aqueous solution |
| Features |
- Direct heat exchanger for water circulated within a plant
- For temperature regulation within the temperature range where
no freezer is needed
- Proven performance with semiconductor process equipment, with a
wide range of features such as high temperature stability, wide
temperature range, failure testing, external signal.
- Conforms to UL and SEMI specifications, CE marking.
|
|
|
|
Peltier-type High-precision
Chiller
|
Series/
CAD |
Set
temperature
range |
Cooling
capacity |
Temperature
stability |
Cooling
method |
Circulating liquid |
| HEC |
10 to 60°C
(50 to 140° F) |
230 W |
±0.01° to
0.03° C |
Peltier-type
air cooled |
Clear water |
140, 320,
600, 1200 W |
±0.01° to
0.03° C |
Peltier-type
water cooled |
Clear water,
Fluorinated
aqueous liquid |
| Features |
- For applications requiring high-precision temperature
control
- High-precision, refrigerant-free temperature control equipment
employing Peltier elements
- Simple structure and high reliability
- Can easily be built into equipments with compact and
low-vibration design
- Compatible with wide range of power supply voltages
- Conforms to UL specifications, CE marking.
|
|
|
|
Peltier-type High-precision
Thermoelectric Bath
|
Series/
CAD |
Set
temperature
range |
Cooling
capacity |
Temperature
stability |
Cooling
method |
Circulating liquid |
| HEB |
-15 to 60°C
(5 to 140° F) |
140 W |
±0.1° C |
Peltier-type
water cooled |
Clear water,
Fluorinated
aqueous liquid |
| Features |
- High-precision temperature-regulation thermostatic chamber that
employs Peltier elements
- Compact and low vibration
- Unique agitation method keeps up-down temperature distribution
to a minimum.
|
|
|
|
Fluoropolymer Peltier-type Chemical
Thermo-con
|
Series/
CAD |
Set
temperature
range |
Cooling
capacity |
Temperature
stability |
Cooling
method |
Circulating liquid |
| HED |
10 to 60°C
(50 to 140° F) |
300 to 750 W |
±0.1° C |
Peltier air
cooling |
Deionized water,
Chemicals |
| Features |
- Heat exchanger employs Peltier elements for direct temperature
control of chemicals
- Fluoropolymer heat exchanger is suitable for a wide range of
chemicals.
- Conforms to UL specifications, CE marking.
|
|
|
High-precision Peltier-type
Thermo
|
Series/
CAD |
Set
temperature
range |
Cooling
capacity |
Temperature
stability |
Cooling
method |
Circulating liquid |
| HEA |
0 to 50°C
(32 to 122° F) |
22 W |
±0.1° C |
Peltier air
cooling |
Air |
| Features |
- High precision, compact temperature control equipment using
Peltier elements.
- Compatible with localized and small-volume temperature
control.
|
|
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Working Principles
The SMC temperature control series have been engineered with the
latest industry leading designs; and have been developed to meet
the requirements of such demanding applications as lasers, machine
tools, printing, and EDM.
By reducing thermal stress on your equipment, temperature
control solutions are tools that can be used to extend the life of
your equipment.
3 Types of Heating and Cooling Methods
| Refrigerated |
Water-Cooled |
 |
 |
|
Generates low temperature using a refrigeration cycle.
|
Refrigerant-free and energy saving using no compressor.
|
| Applications: General use, wide range of
applications. |
Applications: For temperature control in room
temperature area. |
|
Series: HRS, HRG, HRZ-010-WS, HRZD
|
Series: HRW
|
|
Peltier-type, Cooling and Heating
|
 |
|
|
Using alternately located semiconductors, controls temperatures
precisely by changing the direction of the current supplied to the
device.
|
|
| Applications: For high-precision
temperature control. |
|
| Series: HEC, HEA |
Energy Savings with
the Double Inverter Type Refrigerated Thermo Chiller
Power consumption is dramatically
reduced by using a DC inverter refrigerator and inverter pump.
