Temperature Control

Product Overview

Chillers are products that control the temperature of heat sources in customers' devices and equipment using temperature-controlled circulating fluid.  Maintaining a fixed temperature can improve the quality, reliability and service life of devices or equipment.

SMC's line of temperature control units utilize best-in-class technologies to accomplish the exact range of temperature ranges and temperature stability desired by our customers.

With a wide range of applications from optimizing the throughput on a laser machine to improving the end product in injection molding to preventing distortion through the evaporation of chemicals in the semiconductor industry, SMC chillers and thermo-con units have proven performance.

Technical Specifications

HRS Chiller
Compact Thermo-chiller

 

Series/
CAD
Set
temperature
range
Cooling
capacity
Temperature
stability
Cooling
method
Circulating liquid
HRS

5 to 40°C

(41 to 104° F)
1300W
1900W
2400W
5100W
±0.1° C
Air-cooled
refrigeration/
Water-cooled
refrigeration

Clear water, Deionized water, Ethylene glycol
aqueous solution

Features
  • Air-cooled models provide cooling water wherever needed thanks to easy mounting and easy operation.
  • Proven performance with a wide range of applications such as lasers/analysis equipment/LCD manufacturing equipment/analytical instrumentation, etc.
  • Compact W377mm x H615mm x D500mm, 40kg
  • Timer operation function
  • Low level in tank detecting function
  • Power failure auto-restart function
  • Anti-freezing function
  • Self diagnosis function
  • Single-phase 200 to 230VAC, single-phase 100 to 115VAC
  • Conforms to UL specifications, CE marking.

 

 

HRG Chiller

Economy Refrigerated Thermo-cooler

Series/
CAD
Set
temperature
range
Cooling
capacity
Temperature
stability
Cooling
method
Circulating liquid
HRG

5 to 35°C

(41 to 95° F)
10 to 15 kW ±1.0° C/
±0.5° C
Air-cooled
refrigeration/
Water-cooled
refrigeration
Clear water,
Ethylene glycol
aqueous solution
Features
  • Air-cooled models provide cooling water wherever needed thanks to easy mounting and easy operation.
  • Proven performance with a wide range of applications such as lasers/analysis equipment/LCD manufacturing equipment/mold temperature regulators, etc.

 

 

hrz_small

High-performance Refrigerated Thermo-chiller

Series/
CAD
Set
temperature
range
Cooling
capacity
Temperature
stability
Cooling
method
Circulating liquid
HRZ

-20 to 40°C

(-4 to 104° F)
1 to 15 kW ±0.1° C Water-cooled
refrigeration
Fluorinated liquid,
Clear water,
Deionized water,
Ethylene glycol
aqueous solution

20 to 90°C

(68 to 194° F)

-20 to 90°C

(-4 to 194° F)
Features
  • Proven performance with semiconductor process equipment, with a wide range of features such as high temperature stability, wide temperature range, failure testing, external signal.
  • All models conform to safety standards.
  • Conforms to UL and SEMI specifications, CE marking.

 

 

 

hrz_small

High Performance Chiller (Built-in Inverter)

Series/
CAD
Set
temperature
range
Cooling
capacity
Temperature
stability
Cooling
method
Circulating liquid
HRZ-010-WS

-20 to 90°C

(-4 to 194° F)
1.8 to 10 kW ±0.1° C Water-cooled
refrigeration
Fluorinated liquid,
Clear water,
Deionized water,
Ethylene glycol
aqueous solution
Features
  • In addition to the state-of-the-art functions of the HRZ series, these models employ a DC inverter compressor to achieve better energy efficiency.
  • Wide temperature range and cooling capacity range covered by one unit
  • Suited to the short innovation cycle of semiconductor equipment, and capable of responding flexibly to changes in the process conditions.
  • Conforms to UL and SEMI specifications, CE marking.

 

 

hrzd_small

Double Inverter Refrigerated Dual Thermo Chiller

Series/CAD Set
temperature
range
Cooling
capacity
Temperature
stability
Cooling
method
Circulating liquid
HRZD

-30 to 90°C

(-22 to 194° F)
9.5kW x 2 ±0.1° C Water-cooled
refrigeration
Fluorinated liquid
Features
  • Temperature for two systems can be controlled separately by one chiller.
  • Double inverter type : Substantially more energy is saved by using a DC inverter refrigerator and inverter pump.
  • Space saving : Footprint reduced by 23 %
  • Reduced wiring, piping and labor : Single power cable, single facility-water piping system
  • Conforms to CE marking.

 

 

hrw_small

High Performance Water-cooled Thermo Chiller

Series/
CAD
Set
temperature
range
Cooling
capacity
Temperature
stability
Cooling
method
Circulating liquid
HRW

20 to 90°C

(68 to 194° F)
2 to 30 kW ±0.3° C Water-cooled
refrigeration
Fluorinated liquid,
Clear water,
Deionized water,
Ethylene glycol
aqueous solution
Features
  • Direct heat exchanger for water circulated within a plant
  • For temperature regulation within the temperature range where no freezer is needed
  • Proven performance with semiconductor process equipment, with a wide range of features such as high temperature stability, wide temperature range, failure testing, external signal.
  • Conforms to UL and SEMI specifications, CE marking.

 

 

 

hec_small

Peltier-type High-precision Chiller

Series/
CAD
Set
temperature
range
Cooling
capacity
Temperature
stability
Cooling
method
Circulating liquid
HEC

10 to 60°C

(50 to 140° F)
230 W ±0.01° to
0.03° C
Peltier-type
air cooled
Clear water
140, 320,
600, 1200 W
±0.01° to
0.03° C
Peltier-type
water cooled
Clear water,
Fluorinated
aqueous liquid
Features
  • For applications requiring high-precision temperature control
  • High-precision, refrigerant-free temperature control equipment employing Peltier elements
  • Simple structure and high reliability
  • Can easily be built into equipments with compact and low-vibration design
  • Compatible with wide range of power supply voltages
  • Conforms to UL specifications, CE marking.

 

 



heb_small

Peltier-type High-precision Thermoelectric Bath

Series/
CAD
Set
temperature
range
Cooling
capacity
Temperature
stability
Cooling
method
Circulating liquid
HEB

-15 to 60°C

(5 to 140° F)
140 W ±0.1° C Peltier-type
water cooled
Clear water,
Fluorinated
aqueous liquid
Features
  • High-precision temperature-regulation thermostatic chamber that employs Peltier elements
  • Compact and low vibration
  • Unique agitation method keeps up-down temperature distribution to a minimum.

 

 

hed_small

Fluoropolymer Peltier-type Chemical Thermo-con

Series/
CAD
Set
temperature
range
Cooling
capacity
Temperature
stability
Cooling
method
Circulating liquid
HED

10 to 60°C

(50 to 140° F)
300 to 750 W ±0.1° C Peltier air
cooling
Deionized water,
Chemicals
Features
  • Heat exchanger employs Peltier elements for direct temperature control of chemicals
  • Fluoropolymer heat exchanger is suitable for a wide range of chemicals.
  • Conforms to UL specifications, CE marking.

 



hea_small

High-precision Peltier-type Thermo

Series/
CAD
Set
temperature
range
Cooling
capacity
Temperature
stability
Cooling
method
Circulating liquid
HEA

0 to 50°C

(32 to 122° F)
22 W ±0.1° C Peltier air
cooling
Air
Features
  • High precision, compact temperature control equipment using Peltier elements.
  • Compatible with localized and small-volume temperature control.
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Working Principles

The SMC temperature control series have been engineered with the latest industry leading designs; and have been developed to meet the requirements of such demanding applications as lasers, machine tools, printing, and EDM.

By reducing thermal stress on your equipment, temperature control solutions are tools that can be used to extend the life of your equipment.


3 Types of Heating and Cooling Methods

Refrigerated Water-Cooled
tempcontrol-ref tempcontrol-water

 

Generates low temperature using a refrigeration cycle.

 

Refrigerant-free and energy saving using no compressor.

Applications: General use, wide range of applications. Applications: For temperature control in room temperature area.

Series: HRS, HRG, HRZ-010-WS, HRZD

Series: HRW

 

Peltier-type, Cooling and Heating

tempcontrolpelthot

tempcontrolpeltcool

 

Using alternately located semiconductors, controls temperatures precisely by changing the direction of the current supplied to the device.

 

Applications: For high-precision temperature control.  
Series: HEC, HEA

 

Energy Saving

 

 

 

Energy Savings with the Double Inverter Type Refrigerated Thermo Chiller

Power consumption is dramatically reduced by using a DC inverter refrigerator and inverter pump.

tempcontrolenvconsumption

 



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