High Purity Products for Chemical Handling Application
In response to the latest demands in process control, SMC has incorporated leading edge product innovations and engineering excellence to develop a high purity product suite. These high purity solutions strive to continually advance the technology of minimizing contaminates. Achieving success as a quality leader by minimizing both particulate and chemical contamination to levels compatible with the most demanding requirements.
SMC High Purity provides:
- Excellent heat resistance
- Clean specifications
- Outstanding corrosion resistance
- Numerous variations
- Compatibility with fluid temperatures exceeding 400°F
Note for overseas shipments: Export of these products are regulated by the United States Government. Please refer to http://www.bis.doc.gov/ for Export Regulation guidelines.
*NOTE: A number of LQ3 fitting configurations are available, even beyond what is noted within the CAD access tool (examples are noted below).
Application examples: bulk chemical distribution systems, hot chemical wet bench, chemical mechanical planarization
HyperFlare Fittings & Fluoropolymer Tubing
SMC high purity Hyperflare™ Fitting series LQ* responds to the latest demands in process control. From parts cleaning to assembly and packaging, all processes are controlled for cleanliness, and the use of new PFA virtually eliminates particle generation and TOC (total organic carbon) allowing confident use for the most demanding applications. If chemistries or flow requirements are changed during process, our face seal design allows for quick change of tubing, and/or tube diameters, using the same fitting body.
Series LVQ is a 2 port chemical valve with a non-metallic exterior. A high density PVDF housing offers increased chemical resistance and the special diaphragm construction insures gentle opening and closing preventing the formation of micro-bubbles. The LVQ guide ring eliminates lateral motion of the poppet, which reduces internal leakage.
Liquid Flow Measurement & Flow Control
PF2D is a flow switch for liquids including high purity chemicals, solutions, and deionized water. The PF2D is a remote sensor that sends output to a 4-channel panel monitor capable of reporting up to 4 separate outputs. Three flow ranges are available, as well as 3 tube size connections. The monitor displays instantaneous or accumulated flow, as well as an indicator for switch output. This 4-channel monitor reduces installation, space, wiring and cost.