Process Gas Equipment

Ultra High Purity (UHP) regulators for gas delivery in semiconductor and other clean industries.  The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.

Ultra High Purity (UHP) regulators for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.

The Series BP1000 regulator was designed for general use in a wide variety of applications. Available options include Hastelloyinternals for corrosion resistance, panel installation, and a variety of pressure gauges in psig/bar or MPa units.The BP1000W is a welded connection series, back pressure regulator for ultra high purity (UHP) gas delivery in semiconductor and other clean industries.  Available options include Hastelloy internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.

Ultra High Purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with low and high pressures. Available options include Hastelloy® C22, 316L SS secondary remelt, and the choice of normally closed or normally open indicator switch.

Ultra High Purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with  low and high pressures. Available options include Hastelloy®  C22, 316L SS secondary remelt, and the choice of normally closed or normally open indicator switch.

The AP64 is an all welded and springless check valve. The unique ultraclean design has only one moving part and O-ring. The check valve provides reverse flow protection for N2 purge gas introduction and other applications.

There are four vacuum generator models to choose from - two simple vacuum generators, AP 7 and AP70, and two modules, AP71 and AP72, which include vacuum generator, N2 inlet shut off valve and N2 inlet check valve. The modules provide a compact and cost effective solution for vacuum generator installations. The individual vacuum generators provide a variety of configurations. The devices are designed for use in gas delivery systems to improve efficiency when venting for purging.

The AP 74 and AP 74B are safety devices to detect excess flow in UHP gas delivery systems. The switches are available with a wide variety of trip points and configurations. An online selection guide makes choosing the proper switch for a given gas, pressure and maximum flow rate as simple as a few key strokes.