Process Gas Equipment
AP Tech, also known as Advanced Pressure Technology, manufactures a wide assortment of gas delivery components. Founded in 1987, AP Tech has grown to be a global leader in pressure regulators and valves used for semiconductor wafer fabrication and other clean industries such as solar and flat panel displays. AP Tech also services many other industries delivering specialty and bulk gases for a wide variety of applications.
The company was acquired by SMC in May 2007 and continues to operate independently, though now a member of the SMC family.
Pressure Regulators
Manual Adjust Pressure Reducing Regulators
Ultra High Purity (UHP) regulators for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.
Pneumatic Adjust Pressure Reducing Regulators
Ultra High Purity (UHP) regulators for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.
Back Pressure Regulators
Valves
Manual Valves
Ultra High Purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with low and high pressures. Available options include Hastelloy® C22, 316L SS secondary remelt, and the choice of normally closed or normally open indicator switch.
Air Operated Valves
Ultra High Purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with low and high pressures. Available options include Hastelloy® C22, 316L SS secondary remelt, and the choice of normally closed or normally open indicator switch.
Check Valve/Vacuum Generator/Flow Switch
Check Valves
The AP64 is an all welded and springless check valve. The unique ultraclean design has only one moving part and O-ring. The check valve provides reverse flow protection for N2 purge gas introduction and other applications.
Vacuum Generators
There are four vacuum generator models to choose from - two simple vacuum generators, AP 7 and AP70, and two modules, AP71 and AP72, which include vacuum generator, N2 inlet shut off valve and N2 inlet check valve. The modules provide a compact and cost effective solution for vacuum generator installations. The individual vacuum generators provide a variety of configurations. The devices are designed for use in gas delivery systems to improve efficiency when venting for purging.
Flow Switch
The AP 74 and AP 74B are safety devices to detect excess flow in UHP gas delivery systems. The switches are available with a wide variety of trip points and configurations. An online selection guide makes choosing the proper switch for a given gas, pressure and maximum flow rate as simple as a few key strokes.