SL5200, Single Stage Compact Regulator for Ultra High Purity
Series SL is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series has a springless design (no poppet spring in the wetted area), and is available in low to intermediate flow capacities. Available options include Hastelloy® internals for corrosion resistance, a tube weld fitting connection type, and various surface finishes.
For UHP gas delivery
Standard flow capacity: to 30 slpm; high flow capacity: to 130 slpm
Body material: 316L SS secondary remelt
Hastelloy® internals available for corrosion resistance