AP1100, Single Stage Regulator, Delivery of Sub-atmospheric Pressure
AP1100, Single Stage Regulator for Ultra High Purity, Delivery of Sub-atmospheric Pressure
Series AP is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.
For UHP gas delivery
Sub-atmospheric to low positive pressure delivery
Flow capacity: to 0.5 slpm
Body material: 316L SS secondary remelt
Hastelloy® internals available for corrosion resistance