LFU, Low Flow Fluid Controller

The SMC InfiniFlow liquid flow control system, with the Infinilink Windows utility has been designed to be used in applications that require a level of high purity materials for the wetted flow path and a high degree of fluid flow sensing accuracy.  The InfiniFlow flowmeter is an advanced ultrasonic transit-time flow measurement system.  The measurement type is Time of Flight (ToF) ultrasonic using a digital signal processor contrapropogating cross-correlation method.  This method of flow detection allows for extremely fast comparison of upstream and downstream signal transit times, resulting in computation of liquid flow at a rate of 300+ times per second.

The SMC InfiniFlow liquid flow control system incorporates a native PID facility specifically designed for closed-loop, flow control applications.  The system will accept a 0-10 Vdc analog input flow setpoint signal and the linear PID algorithm will maintain repeatable response throughout the system's calibrated flow range.  The SMC flow control valve used in the InfiniFlow system is molded PFA with a PTFE diaphragm and exhbits reliable performance and lifetime in a wide range of chemicals to include CMP slurries.

  • Measures clean liquids and liquids with suspended solids
  • Very low flow rates can be measured
  • Very fast flow transient response
  • B-directional measurement capability
  • High degree of accuracy
  • Reliable performance even with a smal amount of bubbles present
LFU, Low Flow Fluid Controller
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