LFU, Low Flow Fluid Controller
The SMC InfiniFlow™ liquid flow control system, with the Infinilink Windows utility has been designed to be used in applications that require a level of high purity materials for the wetted flow path and a high degree of fluid flow sensing accuracy. The InfiniFlow™ flowmeter is an advanced ultrasonic transit-time flow measurement system. The measurement type is Time of Flight (ToF) ultrasonic using a digital signal processor contrapropogating cross-correlation method. This method of flow detection allows for extremely fast comparison of upstream and downstream signal transit times, resulting in computation of liquid flow at a rate of 300+ times per second.
The SMC InfiniFlow™ liquid flow control system incorporates a native PID facility specifically designed for closed-loop, flow control applications. The system will accept a 0-10 Vdc analog input flow setpoint signal and the linear PID algorithm will maintain repeatable response throughout the system's calibrated flow range. The SMC flow control valve used in the InfiniFlow™ system is molded PFA with a PTFE diaphragm and exhbits reliable performance and lifetime in a wide range of chemicals to include CMP slurries.
- Measures clean liquids and liquids with suspended solids
- Very low flow rates can be measured
- Very fast flow transient response
- B-directional measurement capability
- High degree of accuracy
- Reliable performance even with a smal amount of bubbles present