SL5800, Single Stage Regulator for Ultra High Purity, Intermediate Flow
Series SL is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series has a springless design (no poppet spring in the wetted area), and is available in low to intermediate flow capacities. Available options include Hastelloy® internals for corrosion resistance, a tube weld fitting connection type, and various surface finishes.
For UHP gas delivery
Body material: 316L SS secondary remelt
Inlet pressure: max. 3800 psig (2.1 MPa)
Springless design (no poppet spring in the wetted area)