XL*Q, High Vacuum Angle Valve, Aluminum One-touch Connection & Release

XL*Q, High Vacuum Angle Valve, Aluminum One-touch Connection & Release

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

  • One-touch connection & release, requires no tools
  • Lightweight & compact
  • Auto switch capable
  • XLAQ: single acting, normally closed, bellows seal
  • XLAQ: flange sizes are 16, 25, 40, 50
  • XLDQ: 2-step control, single acting
  • XLDQ: flange sizes are 40, 50
Configuration Options
Copy Configuration Number

Product Options

Select Product Options
Select values from the drop down lists or make appropriate selections to configure the part number.
Variation Configuration Status
Flange Size Configuration Status
Indicator, Actuator Port Direction Configuration Status
Temperature Specifications, Heater Configuration Status
Auto Switch Configuration Status
Lead Wire Configuration Status
Number of Switches, Mounting Position Configuration Status
X Configuration Status
Body Surface Treatment Configuration Status
Seal Material Configuration Status
Seal & Leakage Change Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.


The part number needs to be complete in order to view/download CAD Models.

Model does not exist, please email cad@smcusa.com with the complete part number, CAD file format and version required.

CAD Downloads

Download CAD File

View CAD Models

View 3D Model

Product Catalog

Series Catalog

RoHS Certificate

Download Certificate