XL*V-2, Aluminum High Vacuum Angle Valves, Air Operated w/Solenoid Valve
Series XLAV-2 and XLFV-2 are high vacuum angle valves for use in industrial applications employing high vacuum and process gases. Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. XLAV valves are single-acting, normally closed, with a bellows seal over the shaft and spring. The bellows assembly can be replaced, reducing maintenance costs and waste materials.
The XLFV-2 is also single-acting, normally closed. The spring an shaft are exposed to gas flow, but a scraper and O-ring seal the piston pressure volume from process gases. Both valve styles open when pressure is applied at the pilot port, which is controlled by a body mounted solenoid valve. The valve body is hard anodized A6063 aluminum, with 304 stainless steel valves and an electroless nickel plated steel spring. XLFV-2 bellows are 316L stainless steel. Numerous seal material are available for a wide range of chemical compatibility.
- Excellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve
- High corrosion resistance to fluorine gas
- Minimal outgassing
- Minimal contamination from heavy metals
- Optional heaters
- Optional position sensors
- Optional oxalic acid anodizing for internals