XL*V-2, Aluminum High Vacuum Angle Valves, Air Operated w/Solenoid Valve

XL*V-2, Aluminum High Vacuum Angle Valves, Air Operated w/Solenoid Valve

Series XLAV-2 and XLFV-2 are high vacuum angle valves for use in industrial applications employing high vacuum and process gases.  Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  XLAV valves are single-acting, normally closed, with a bellows seal over the shaft and spring.  The bellows assembly can be replaced, reducing maintenance costs and waste materials.

The XLFV-2 is also single-acting, normally closed.  The spring an shaft are exposed to gas flow, but a scraper and O-ring seal the piston pressure volume from process gases.  Both valve styles open when pressure is applied at the pilot port, which is controlled by a body mounted solenoid valve.  The valve body is hard anodized A6063 aluminum, with 304 stainless steel valves and an electroless nickel plated steel spring.  XLFV-2 bellows are 316L stainless steel.  Numerous seal material are available for a wide range of chemical compatibility.

  • Excellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve
  • High corrosion resistance to fluorine gas
  • Minimal outgassing
  • Minimal contamination from heavy metals
  • Optional heaters
  • Optional position sensors
  • Optional oxalic acid anodizing for internals
Configuration Options
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Product Options

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Select values from the drop down lists or make appropriate selections to configure the part number.
Valve Type Configuration Status
Flange Size Configuration Status
Flange Type Configuration Status
Valve Direction Configuration Status
Auto Switch Configuration Status
Lead Wire Configuration Status
Number Configuration Status
Voltage Configuration Status
Electrical Entry Configuration Status
Surge Suppressor Configuration Status
Non-standard Indicator Configuration Status
Body Surface Treatment Configuration Status
Seal Material Configuration Status
Seal Replacement Configuration Status
CE-Compliant Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.


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