XLF, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal

XLF, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal

XLF is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal.  The XL* family shares common features with all series members.  Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body.  The body offers excellent resistance to fluorine corrosion.  A low sputtering yield and the absence of heavy metals avoid wafer contamination.


  • Excellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve
  • High corrosion resistance to fluorine gas
  • Minimal outgassing
  • Minimal contamination from heavy metals
  • Optional heaters
  • Optional position sensors
  • Optional oxalic acid anodizing for internals
Configuration Options
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Product Options

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Select values from the drop down lists or make appropriate selections to configure the part number.
Flange Size Configuration Status
Flange Type Configuration Status
Port Direction Configuration Status
Temperature Configuration Status
Version Configuration Status
Auto Switch Configuration Status
Lead Wire Configuration Status
Number Configuration Status
Non-standard Indicator Configuration Status
Body Surface Treatment Configuration Status
Seal Material Configuration Status
Seal Replacement Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.


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