SRF, Clean Regulator

The SRF30 series is designed to regulate DI water and N2 gas in the clean room. Fluoro resin material is used in the fluid contact area. The fluid contact area is washed with freon ultra sonic and DI water.

  • Clean regulator series
  • One piece structure w/LQ fitting
  • Tube porting available
  • Tube sizes (inch): 1/4, 3/8
  • Tube sizes (mm): 6, 8, 10
SRF, Clean Regulator
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