Industries Powered by SMC

SF series clean air filters are available as cartridge type or disposable type models.  The filtration level is 0.01 micron (filtering efficiency of 99.99%) on units with membrane elements.  The SFB20, with a sintered metallic element, has a nominal filtration of 120 micron.  The SF series can be used under different environments with chemical resistant and heat resistant materials (refer to catalog specifications for each series).

Clean regulator series SRH is a contamination controlled stainless steel regulator designed to minimize residual fluid. Design includes an intake/exhaust port in the diaphragm compartment, which facilitates flow. SRH has outstanding corrosion resistance. All metal parts in contact with fluid use stainless steel SUS316.

Series PF3A digital flow switch provides continuous quantitative values as well as switched digital outputs when set flow levels are measured. The PF3A is suitable for applications requiring a metered quantity of air, such as for supply confirmation, filling accumulation, or fixed supply consumption. The oversized PF3A display has 2 screens, with main screen flow values in red or green, while the sub screen settings are shown in orange. The display can be rotated in 90 degree increments, thereby offering better visibility during operation. The thermal sensor is protected in a bypass flow path to reduce contact with moisture and contaminants, avoiding accuracy deterioration and damage.  The PF3A has an IP65 ingress protection rating and is both RoHS and CE compliant.

Smooth vent valve series XVD2 is a normally closed type valve with connection types VCR (male & female) and Swagelok. Port size for the main supply is 1/4" and orifice is 3mm. Materials consist of SUS316L (body & bellows), SUS304 (diaphragm) and FKM (valve and external seal).

HRZ recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature ±0.1°C. All models offer compatibility with R404A and R134a refrigerants. 4 cooling capacities are available. This model is compatible with fluorinated coolants including Fluorinert™ and GALDEN®.

Solenoid control valves are good for general purpose use.  Direct acting poppet valves available in normally closed and normally open varieties.  Available in a varietey of materials including resin, aluminum, brass and stainless  steel.

Liquid flow sensors with buttons and a display to set and read values from an operator's position.

Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.

With no external leakage, the CY series can be used in many diverse environments. Magnetically coupled cylinders have a wide range of applications, and save mounting space. Loads and moments are possible through the use of integrated guides. A variety of guides can be used to achieve the necessary accuracy or allowable moment needed for your application. CY is available in 9 bore sizes, from 6mm to 63mm with standard stokes up to 1000mm. The 5 different model variations offer widest application choice. Auto switches are integrated as standard.

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

XLF is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal.  The XL* family shares common features with all series members.  Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body.  The body offers excellent resistance to fluorine corrosion.  A low sputtering yield and the absence of heavy metals avoid wafer contamination.

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

Series XLA are high vacuum angle valves for use in industrial applications employing high vacuum and process gases.  Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  XLA valves are single-acting, normally closed, with a bellows seal over the shaft and spring.  The vavle opens when pressure is applied at the pilot port.  The bellows assembly can be replaced, reducing maintenance costs and waste materials.  The valve body is hard anodized A6063 aluminum, with 304 stainless steel valves and bellows.  Numerous seal materials are available for a wide range of chmical compatibility.

XLF is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal.  The XL* family shares common features with all series members.  Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body.  The body offers excellent resistance to fluorine corrosion.  A low sputtering yield and the absence of heavy metals avoid wafer contamination.

SMC high purity Hyperflare™ Fitting series LQ* responds to the latest demands in process control. From parts cleaning to assembly and packaging, all processes are controlled for cleanliness, and the use of new PFA virtually eliminates particle generation and TOC (total organic carbon) allowing confident use for the most demanding applications. If chemistries or flow requirements are changed during process, our face seal design allows for quick change of tubing, and/or tube diameters, using the same fitting body.

Series LVQ is a 2 port chemical valve with a non-metallic exterior. A high density PVDF housing offers increased chemical resistance and the special diaphragm construction insures gentle opening and closing preventing the formation of micro-bubbles. The LVQ guide ring eliminates lateral motion of the poppet, which reduces internal leakage.

Series PA is a double acting, compact, large capacity diaphragm pump suitable for transfer and recovery of a wide variety of fluids. The PA series is available in 3 types; automatically operated, air operated or automatically operated with a built-in pulsation attenuator.