XGT*, High Vacuum Slit Valve

Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, or between the transfer chamber and the process chamber in semiconductor manufacturing equipment or other equipment.

  • Long service life: 3 million cycles (within standard temperture range)
  • Low particle generation: reduced by 1/5 or more (compared with the current product)
  • Easier maintenance
  • Easy replacement of bellows
  • Gate can be replaced from above (Made to order)
  • Safety measures
  • A mechanical end lock mechanism has been adopted
XGT*, High Vacuum Slit Valve
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Product Options

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Select values from the drop down lists or make appropriate selections to configure the part number.
Type Configuration Status
Valve Size Configuration Status
Valve Type Configuration Status
Opening Window Size Configuration Status
Gate O-ring Material Configuration Status
Auto Switch & Connector Configuration Status
End Lock Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.

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