High Vacuum Products
High Vacuum for semiconductor wafer manufacturing requires precision equipment to exhaust air from the process chamber and to supply atmospheric to restore the chanber to atmospheric pressure.
Slit Valves (XGTP) allow access to transfer the wafer into and out of the process chamber.
Angle and Inline Valves (XL, XM, XY) are used to exhaust the chamber.
Supply Valves (XSA, XVD) are used to supply gases to the chamber.
High vacuum angle and in-line valves are for use in industrial applications employing high vacuum and process gases. Common industries that may use these angle valves include semiconductor, solar and other electonics production, as well as food and pharmaceutical manufacturing.
Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.
Smooth vent valves are normally closed type valve with connection types VCR (male & female) and Swagelok. Port size for the main supply is 1/4" and orifice is 3mm. Materials consist of SUS316L (body & bellows), SUS304 (diaphragm) and FKM (valve and external seal).
Series XSA is a normally closed solenoid valve suitable for air or inert gas in high vacuum applications. This valve functions properly at an operating pressure as low as 1x10-6 Pa(absolute). Face Seal and compression fitting options offer extremely low levels of internal and external leakage. Two DC and eight AC voltage options are available, paired with multiple electrical entry styles.