Electric Actuator Products for Clean Rooms
The LEF series slider type electric actuator features a low profile height of 46mm (LEF16). The actuator's main body can be mounted without removing any exterior components, such as the cover, making installation easy. The standard equipped seal band covers the guide, ball screw and belt, preventing grease and external foreign matter from splashing and entering the LEF. There are 2 types of drivers available, ball screw or timing belt. Available motors include servo motor ball screw drive or step motor belt drive. When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the "easy mode".
11-LEFS Electric Actuator, Slider Type, Ball Screw Drive, Step Motor/Servo Motor, Clean Room
The Clean Room compatible LEF series is a specialized slider-type electric actuator designed for high-precision motion control in cleanrooms. It features a low-profile design and a unique seal band that covers the internal guide and screw to prevent grease splatter or particle contamination. For enhanced cleanliness, the unit includes built-in vacuum piping with an exhaust port to actively remove generated particles during operation. Designed for ease of use, it allows for mounting without removing exterior covers and offers an "easy mode" for rapid start-up when ordered with a pre-set SMC controller.
Clean Room AC Servo Sliders
The LEF series slider type electric actuators are high-performance linear motion solutions specifically engineered to meet ISO Class 4 (US FED STD 209E Class 10) cleanliness standards. They feature a built-in vacuum port that extracts internal particles generated by the ball screw and guides during operation. These sliders support high-resolution encoders (up to 22-bit) and provide superior control over speed, acceleration, and positioning making them ideal for high-precision transport tasks in the semiconductor, pharmaceutical, and electronic assembly industries.
11-LEFG, Support Guide, Ball Screw, Clean Room
The 11-LEFG Support Guide is a non-motorized linear component designed to complement motorized sliders by providing structural support for significantly overhanging workpieces in clean room environments.It ensures smooth, parallel motion for large loading platforms in multi-axis pick-and-place systems. Available in body sizes 16 through 40 and strokes up to 1000 mm, it offers the same dynamic allowable moment as motorized sliders, making it an essential auxiliary for high-precision, heavy-load automation.