AP1500, Single Stage Regulator for Ultra High Purity, Low Flow, Tied-diaphragm
Series AP is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.
- For UHP gas delivery
- High inlet pressure type: max. 3500 psig (24.1MPa)
- Flow capacity: standard to 30 slpm
- Body material: 316L SS secondary remelt
- Hastelloy® internals available for corrosion resistance
- Tied-diaphragm design