AZ3571 & AZ4571, Diaphragm Valve, Air Operated, Two Step

Series AZ3571 & AZ4571 are a Two Step, ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated. 

  • Two step mode - metered flow and full open
  • Two separate actuation ports
  • Soft start valve to minimize vacuum chamber pressurization turbulence
  • Metered flow adjustable 
  • Pneumatically actuated normally closed
  • Body material: 316L SS
AZ3571 & AZ4571, Diaphragm Valve, Air Operated, Two Step
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Metered Flow (slpm)
[10-350]
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  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.

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