PFCQ, Flow Controller for Air, 9-300 lpm

PFCQ is a flow controller for clean, dry compressed air or nitrogen that can adjust the flow automatically in response to an analog voltage or current signal. The device combines a flow body, flow sensor, linear motor, valve and electronics to achieve the desired flow rate. Control is linear within the rated flow range. The PFCQ is grease- and oil-free with no copper or aluminum in the fluid flow path, to be suitable for FOUP and EFEM semiconductor manufacturing equipment. An optional PFG flow monitor can be connected for displaying the flow rate and switch output. Power and input signals connect via a D-sub connector. CE, UKCA, and RoHS certified.

  • Flow range: 9 to 300 lpm
  • Operating differential pressure range: 0.05 to 0.5 MPa
  • Port size: 1/2 Rc
  • Power supply: 24 VDC
  • I/O signal: 1-5 VDC or 4-20 mA
  • Accuracy: ±3% F.S.
  • Settling time: ≤ 0.5 seconds
PFCQ, Flow Controller for Air, 9-300 lpm
Configuration Options
  
 
Copy Configuration Number

Product Options

Select Product Options
Select values from the drop down lists or make appropriate selections to configure the part number.
Input/Output Configuration Status
Power Supply Cable Configuration Status
Bracket Configuration Status
Display Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.

Downloads

The part number needs to be complete in order to view/download CAD Models.

Model does not exist, please email cad@smcusa.com with the complete part number, CAD file format and version required.

CAD Downloads

Download CAD File

View CAD Models

View 3D Model

Product Catalog

Series Catalog

RoHS Certificate

Download Certificate