AZ
Series AZ is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. This series is available in manually operated.
![AZ3652 & AZ4652, Diaphragm Valve, Manually Operated](https://content2.smcetech.com/image/medium/AZ3652.jpg)
AZ3652 & AZ4652, Diaphragm Valve, Manually Operated
Series AZ is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. This series is available in manually operated.
- Cleaned for high purity semiconductor applications
- Cleanroom assembled and Helium leaked tested
- Valve meets dimensional requirements of SEMI F36-0299, Option 1
- User-friendly forged body
- Compact and lightweight
Product & CAD Models
- Actuators
- Directional Control Valves
- Airline Equipment
- Air Dryers Main Line Filters
- Connectors
- Vacuum Products
- Industrial Communication
- Sensors Switches Controllers
- Fluid Process
- Static Control
- Electric Actuators
- Chillers
- Process Gas Equipment
- High Vacuum
- Chemical Handling Equipment
- Cobot Gripping Solutions
- Secondary Battery