AZ
Series AZ is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. This series is available in manually operated.
AZ3600, Diaphragm Valve, Manually Operated
Series AZ3600 is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. This series is available in manually operated and a pull twist knob with LOTO option.
- Suitable for UHP gas supply line
- Body material: 316L SS
- LOTO standard with AZ3659 and AZP3657
- Optional indicator switch for model AZ3650
AZ4600, Diaphragm Valve, Manually Operated
Series AZ4600 is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. This series is available in manually operated and option LOTO on some models.
- Suitable for UHP gas supply line
- Body material: 316L SS
- LOTO standard with AZ4657/4659, optional AZ4625
- Indicator switch available as an option (AZ4650)
AZ4150 Diaphragm Valve, Manually Operated Type
Series AZ4150 is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. This series is available in manually operated and a pull twist knob with LOTO option.
- Suitable for UHP gas line supply line
- Body material: 316L SS
- Manually actuated type valve
- LOTO standard with AZ4150 only
- Up to 4 ports are available
AZ3800/AZ3900, Diaphragm Valve, Manually Operated for High Flow
Series AZ is a high purity diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with low and high pressures. Available options include a purge port.
- Suitable for gas supply line
- Body material: 316L SS
- Purge ports configurations available
- LOTO available (AZ3900)
AZ3672/3675/4675, Flow Metering Valve, Manually Operated
Series AZ3672/AZ3675/AZ4675 is a diaphragm valve for gas delivery in semiconductor and other clean industries. This series is 1/4 inch metering valve.
- Body material: 316L SS
- Fine adjustment control 12 to 15 turns of the knob to wide open
- Optional indicator switch for model AZ3650
- Flow rates: AZ3672: 10 slpm, AZ3675: 40 clpm, AZ4675: 70 slpm