XLS, High Vacuum Angle Valve, Electromagnetic Type, Bellows Balance
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- Particulates are reduced because there are no sliding metal parts
- Pressure balance mechanism allows unrestricted exhaust direction
- Can be used in portable equipment since air for drive is not required
- A control power supply circuit for solenoid valve drive has been made standard