XLS, High Vacuum Angle Valve, Electromagnetic Type, Bellows Balance

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

  • Particulates are reduced because there are no sliding metal parts
  • Pressure balance mechanism allows unrestricted exhaust direction
  • Can be used in portable equipment since air for drive is not required
  • A control power supply circuit for solenoid valve drive has been made standard
XLS, High Vacuum Angle Valve, Electromagnetic Type,  Bellows Balance
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Valve Size Configuration Status
Control Power Supply Configuration Status
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Electrical Entry Configuration Status
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  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.


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