Chillers and Temperature Control Equipment

Temperature Control Hero Image

SMC's line of chillers and heat exchangers utilizes best-in-class technologies to accomplish the exact temperature ranges and stability desired by our customers. Our chillers and thermo-control units have proven performance in a wide range of applications.


General Purpose Compact Chiller

Series HRS/HRSE

HRS compact recirculating chillers operate in cooling capacity range of 1.3 to 15 kW. These portable chillers include both the coolant and refrigeration circuits. Extracted heat can be air or water cooled. The operations interface includes an input keypad and digital display, an angled fluid supply port with level check, and tool-less filter replacement (air cooled model). Power supplies are available in both 200 and 400VAC 3-phase, and function in both 50 and 60Hz environments for global compatibility. 35 alarms report on a variety of circuit and equipment conditions to preserve optimal operation. HRS chillers can control thermal requirements of machine tools, lasers and photonics, and analytical instruments. Other suitable environments include life sciences, food and packaging, and printing.

Additional features include: Timer Operation, Low Level in Tank Detection, Power Failure Auto-restart, Anti-freezing Function, and Self Diagnosis.

Model Cooling Capacity (at 60Hz) Temp. Setting Temp. Stability Cooling Method Circulating Fluid
HRS 115VAC 1.3 ~ 1.7 kW 5 ~ 40°C ±0.1°C Air/Fan
Facility Water
Clear Water
15% Ethylene Glycol
HRS 230VAC 1.3 ~ 5.9 kW 5 ~ 40°C ±0.1°C Air/Fan
Facility Water
Clear Water
15% Ethylene Glycol
HRS090 200/400VAC 9 ~ 10.5 kW 5 ~ 35°C ±0.5°C Air/Fan
Facility Water
Clear or DI Water
15% Ethylene Glycol
HRS100/150 200VAC 10 ~ 15 kW 5 ~ 35°C ±1.0°C Air/Fan
Facility Water
Clear or DI Water
15% Ethylene Glycol
HRS100/150 400VAC 10 ~ 15 kW 5 ~ 35°C ±1.0°C Air/Fan
Facility Water
Clear or DI Water
15% Ethylene Glycol
HRSE 100VAC 1.2 ~ 1.6 kW 10 ~ 30°C ±2°C Air Clear Water
15% Ethylene Glycol
HRSE 200VAC 1.2 ~ 2.2 kW 10 ~ 30°C ±2°C Air Clear Water
15% Ethylene Glycol
HRS 460VAC Up to 20.5 kW 5 ~ 35°C ±1°C Air Clear Water
15% Ethylene Glycol

HECR Rack Mount Chiller

Series HECR (Rack Mount)

The HECR is a low capacity, refrigerant-free temperature control device mountable in a 19-inch rack. Rack mounting recovers desktop or floor space, permitting stacking of related devices and mobility, depending on the rack style. The HECR achieves high precision regulation of recirculating coolant using an air or water-cooled peltier element..

Standards: CE, UL, RoHS

Model Cooling Capacities Temp. Setting Temp. Stability Cooling Method Circulating Fluid
HECR-A 200W
400W
510W
800W
1000W
10 ~ 60°C ±0.01 to ±0.03°C Air/Fan Clear Water
20% Ethylene Glycol
HECR-W 800W
1200W
10 ~ 60°C ±0.01 to ±0.03°C Facility Water Clear Water
20% Ethylene Glycol

HRR Rack Mount Chiller

Series HRR (Rack Mount)

The HRR is a temperature control device mountable in a 19-inch rack. Rack mounting recovers desktop or floor space, permitting stacking of related devices and mobility, depending on the rack style. Recirculating fluid removes heat from the process source. The heat is then removed from the fluid by an air or water-cooled refrigeration circuit. Coolant temperature stability is ±0.1°C within a set temperature range of 10 to 35°C.

Standards: CE, UL, RoHS

Model Cooling Capacities Temp. Setting Temp. Stability Cooling Method Circulating Fluid
HRR-A 1.2kW (60Hz)
1.8kW
2.4kW
3.0kW
10 ~ 35°C ±0.1°C Air/Fan Clear Water
15% Ethylene Glycol
HRR-W 1.2kW (60Hz)
1.8kW
2.4kW
3.0kW
10 ~ 35°C ±0.1°C Facility Water Clear Water
15% Ethylene Glycol

General Purpose High Capacity Chiller

Series HRSH

HRSH recirculating chillers offer a cooling capacity range of 10 to 28 kW. Coolant and refrigeration circuits are included in a compact and lightweight package. Extracted heat can be air or water cooled. An inverter provides demand-based rotation control for the compressor, pump and fan (air cooled model), offering substantial energy savings.  Electric options ensure global power supply compatibility.

Additional features include: Heating Function, Low Maintenance Seal-less Immersion Pump, and IPX4 Rating for Outdoor Installation.

Model Cooling Capacity Temp. Setting Temp. Stability Cooling Method Circulating Fluid
HRSH-A 200VAC 10.5 ~ 28 kW 5 ~ 35°C ±0.1°C Air/Fan Clear or DI Water
15% Ethylene Glycol
HRSH-W 200VAC 11.5 ~ 24 kW 5 ~ 35°C ±0.1°C Facility Water Clear or DI Water
15% Ethylene Glycol
HRSH-A 400VAC 10.5 ~ 28 kW 5 ~ 35°C ±0.1°C Air/Fan Clear or DI Water
15% Ethylene Glycol
HRSH-W 400VAC 11.5 ~ 24 kW 5 ~ 35°C ±0.1°C Facility Water Clear or DI Water
15% Ethylene Glycol
HRSH090 200/400VAC 9.5 ~ 11 kW 5 ~ 40°C ±0.1°C Air/Fan
Facility Water
Clear or DI Water
15% Ethylene Glycol

Dual Channel Chiller for Lasers

Series HRL (Dual Channel)

The HRL is a temperature control device featuring two independent cooling channels in one package. This thermo chiller is designed to cool the optical head and oscillator of a laser processing system. Considerable space savings can be realized compared to a two chiller solution. All operations can be managed from a single touch panel. A triple inverter controls power consumption of the fan, pump, and compressor for optimal energy savings. The heating function uses waste heat from the refrigerant discharge instead of a separate electric heater to improve efficiency and reliability. The channel for the optical system is copper free and suitable for DI water, including a DI filter and electrical conductivity control kit.

Additional features include: 5µm particle filter, earth leakage breaker, casters for mobility, and environment friendly R410A refrigerant.

Model Cooling Capacity Temp. Setting Temp. Stability Cooling Method Circulating Fluid
HRL 200VAC ch1. 9~26 kW
ch2. 1 kW
ch1. 15~25°C
ch2. 20~40°C
ch1. ±0.1°C
ch2. ±0.5°C
Air/Fan ch1. Clear Water
ch2. Clear or DI Water

High Performance Heat Exchanger

Series HRW

HRW heat exchangers are refrigerant free and use no compressor. This energy efficient design saves further by using an inverter pump for demand-based rotation control.  Four models offer cooling capacities from 2 to 30 kW. The HRW is rated for high performance temperature stability of ±0.3°C through a set range of 20 to 90°C. The operation panel includes an input keypad and multi-line LCD display. 23 alarms report on a variety of circuit and equipment conditions to facilitate optimal operation. In addition to standard I/O and RS-485 serial communications, analog and DeviceNet™ communications are optional.

Standards include: UL, CE, SEMI (S2-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95)

Model Cooling Capacity Temp. Setting Temp. Stability Cooling Method Circulating Fluid
HRW 200VAC 2 ~ 30 kW 20~90°C ±0.3°C Facility Water Clear or DI Water
Flourinated Fluid
60% Ethylene Glycol

High Performance Specialty Chiller

Series HRZ

HRZ recirculating chillers are especially suited for semiconductor and other high technology sectors by conforming to SEMI equipment standards for safety, environment and health, ergonomics, and voltage sag immunity. Cooling capacities range from 1 to 10 kW. A double inverter option is available, featuring a DC inverter compressor and inverter pump, to save power and reduce the facility water demand. The HRZ has a wide temperature setting range and compatibility with several coolant fluid types.

Standards include: UL, CE, SEMI (S2-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95)

Model Cooling Capacity Temp. Setting Temp. Stability Cooling Method Circulating Fluid
HRZ 200VAC 1 ~ 8 kW -20~90°C ±0.1°C Facility Water Flourinated Fluid
HRZ-1 200VAC 1 ~ 8 kW -20~90°C ±0.1°C Facility Water Ethylene Glycol
HRZ-2 200VAC 1 ~ 8 kW 10~40°C ±0.1°C Facility Water Clear or DI Water
HRZ-S 200VAC
(Double Inverter)
10 kW -20~90°C ±0.1°C Facility Water Clear or DI Water
60% Ethylene Glycol
Flourinated Fluid

Circulating Bath

Series HEB (Benchtop)

The HEB is a thermoelectric circulating bath comprised of a controller and liquid tank.  Cooling is performed by a refrigerant-free peltier element, with extracted heat removed via facility water connection.  Temperature can be set from -15.0 to 60.0°C (flourinated fluid), achieving a distribution of ±0.2°C in the bath.  Abnormal heating and temperature sensor errors can be detected and reported.  Overall dimensions and power requirements are suitable for laboratory benchtop service.

Standards include: CE, UL

Model Cooling Capacity Temp. Setting Temp. Stability Cooling Method Circulating Fluid
HEB 100~240VAC 140W -15~60°C
   5~60°C
±0.01°C Facility Water Flourinated Fluid
Clear Water

Benchtop Precision Chiller

Series HEC (Benchtop)

HEC recirculating chillers satisfy low capacity temperature control demand in the range of 140 to 1200 watts.  A refrigerant-free, thermoelectric peltier element controls temperature from 10.0 to 60.0°C, with precision of ±0.1°C under stable load conditions.  Extracted heat can be air or water cooled.  15 alarms support functional troubleshooting, and can be observed on the LCD display or over serial communication.  Low noise and vibration, compact dimensions and flexible power requirements are suitable for laboratory benchtop service.

Standards include: CE, UL, RoHS

Model Cooling Capacities Temp. Setting Temp. Stability Cooling Method Circulating Fluid
HEC-A 100~240VAC 230W
600W
10~60°C ±0.01°C Air/Fan Clear Water
HEC-W5 100~240VAC 140W
320W
10~60°C ±0.01°C Facility Water Clear Water
20% Ethylene Glycol
HEC-W2 200VAC 600W
1200W
10~60°C ±0.01°C Facility Water Clear Water
Flourinated Fluid

Benchtop Chemical Chiller

Series HED (Benchtop)

The HED is a specialty recirculating chiller designed for direct temperature control of chemical liquids in the 300 to 750 watt capacity range.  The device consists of a controller and separate fluororesin heat exchanger.  An external circulation pump must be customer supplied.  Typical compatible fluids include hydrofluoric and sulfuric acid, copper sulfate solution, ammonia hydrogen peroxide, sodium hydroxide, and deionized or ozonated water.  A refrigerant-free, thermoelectric peltier element controls temperature from 10.0 to 60.0°C, with precision of ±0.1°C.  Extracted heat can be removed via facility water connection.  17 failure diagnostics can be displayed on the LCD display or read out over serial communication.

Standards include: CE, SEMI S2-0706, F47-0706, RoHS

Model Cooling Capacities Temp. Setting Temp. Stability Cooling Method Circulating Fluid
HED 180~242VAC 300W
500W
750W
10~60°C ±0.1°C Facility Water Deionized Water
Hydroflouric/Sulfuric Acid
Ammonia Hydrogen Peroxide
Others - See Catalog

Product Features:

  • Air and water cooled models
  • Compact
  • Conforms to UL specifications (60 Hz only), also CE marked
  • Environmentally friendly refrigerants: R407C and R410A
  • Low tank fluid level detection function
  • Power failure auto-restart function
  • RS232C, RS485, and contact I/O for remote access and signals
  • Single phase power for simple installation
  • Timer operation function

Instruction Manuals