XLC Aluminum High Vacuum Angle Valve Double Acting Bellows Seal
XLC, Aluminum High Vacuum Angle Valve, Double Acting, Bellows Seal
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Air pressure applied to pilot port shifts piston-coupled valve
Replaceable bellows reduces maintenance cost and waste material
Additional maintenance parts available to extend useful life of valve
Standard FKM seals, plus 8 additional seal compound options
Auto switches mountable from 4 directions
Optional 100°C and 150°C heaters (UL compliant lead wire)