HRZ-F, SEMI Standard Double Inverter Chiller, for Ethylene Glycol Coolant
HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. Both the pump and compressor rotations are inverter controlled for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with a 60% ethylene glycol aqueous solution for the coolant.
- Cooling capacities: 2kW, 4kW, 8kW, 10kW
- Circulating Fluid: 60% ethylene glycol aqueous solution
- Temperature range setting: -10 to 90°C (2kW), -20 to 90°C (4, 8, 10kW)
- Temperature stability: ±0.1°C
- Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz
- Standards: CE, UL, RoHS, SEMI S2, S8, F47