HRZ-F, SEMI Standard Double Inverter Chiller, for Tap or DI Water Coolant

HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C.  Both the pump and compressor rotations are inverter controlled for energy efficiency.  Refrigerant is R410A, compliant with current EU F-gas regulations.  This model is compatible with tap water or deionized water for the coolant.

  • Cooling capacities: 2kW, 4kW, 8kW, 10kW
  • Circulating Fluid: tap water or DI water
  • Temperature range setting: 10 to 60°C
  • Temperature stability: ±0.1°C
  • Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz
  • Standards: CE, UL, RoHS, SEMI S2, S8, F47
HRZ-F, SEMI Standard Double Inverter Chiller, for Tap or DI Water Coolant
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