HRZ-F, SEMI Standard Pump Inverter Chiller, for Tap or DI Water Coolant
HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. This model includes inverter control of the pump rotations for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with a 60% ethylene glycol aqueous solution for the coolant.
- Cooling capacities: 8kW
- Circulating Fluid: 60% ethylene glycol aqueous solution
- Temperature range setting: -20 to 40°C
- Temperature stability: ±0.1°C
- Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz
- Standards: CE, UL, RoHS, SEMI S2, S8, F47