XLAV, Aluminum High Vacuum Angle Valves, Air Operated w/Solenoid Valve

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

  • Excellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve
  • High corrosion resistance to fluorine gas
  • Minimal outgassing
  • Minimal contamination from heavy metals
  • Optional heaters
  • Optional position sensors
  • Optional oxalic acid anodizing for internals
XLAV, Aluminum High Vacuum Angle Valves, Air Operated w/Solenoid Valve
Configuration Options
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Product Options

Select Product Options
Select values from the drop down lists or make appropriate selections to configure the part number.
Valve Type Configuration Status
Flange Size Configuration Status
Flange Type Configuration Status
Valve Direction Configuration Status
Version Configuration Status
Auto Switch Configuration Status
Lead Wire Configuration Status
Number Configuration Status
Voltage Configuration Status
Electrical Entry Configuration Status
Surge Suppressor Configuration Status
Non-standard Indicator Configuration Status
Body Surface Treatment Configuration Status
Seal Material Configuration Status
Seal Replacement Configuration Status
CE-Compliant Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.


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