N₂Gas/Air Supply Line
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The N2 gas or air supplied to a vacuum chamber to restore atmospheric pressure upon wafer introduction must have a high degree of cleanliness. At the entrance of the chamber, the flow is rectified with a SF series clean gas filter (with 100% filtration efficiency of 0.01 µm particles) and a stainless steel diffusion element inside the chamber. The SRH clean regulator provides a constant pressure and the PF2A flow switch enables precise flow control, both with outstanding corrosion resistance for optimal contamination control. The XVD2 smooth vent valve is used to change the flow rate of the N2 or clean air, which is supplied slowly at the initial stage after opening, and on achieving a certain pressure, is switched to the main valve for a full supply to prevent particle turbulence.
Cooling Water & Temperature Control Line
VDW / VX2 Process Valves
Solenoid control valves are good for general purpose use. Direct acting poppet valves available in normally closed and normally open varieties. Available in a varietey of materials including resin, aluminum, brass and stainless steel.
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HRZ recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature ±0.1°C. All models offer compatibility with R404A and R134a refrigerants. 4 cooling capacities are available. This model is compatible with fluorinated coolants including Fluorinert™ and GALDEN®.
- Cooling capacities: 1kW, 2kW, 4kW, 8kW
- Temperature range setting: -20 to 40°C, 20 to 90°C, -20 to 90°C
- Temperature stability: ±0.1°C
- Power supply requirement: 3-phase 200 VAC / 50Hz or 3-phase 200~208 VAC / 60Hz
- Standards: CE, UL, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)
- Circulating fluid: Fluorinert™ or GALDEN® (see catalog for compatibility)
In order to optimize wafer processing and deposit removal, the temperature in each chamber (especially the process chamber) is precisely controlled. SMC products such as the VDW / VX2 series 2-port solenoid process valves for water, PF3W series digital flow switches for water, and the ISE80 digital pressure switch work together to properly control and measure the cooling water critical to the process. High performance thermo-chillers like our HRZ series are used to cool and maintain the chamber temperatures to within ±0.1 °C.
Transfer Line (Vacuum Chambers)
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CYV Vacuum Rodless Cylinder
With no external leakage, the CY series can be used in many diverse environments. Magnetically coupled cylinders have a wide range of applications, and save mounting space. Loads and moments are possible through the use of integrated guides. A variety of guides can be used to achieve the necessary accuracy or allowable moment needed for your application. CY is available in 9 bore sizes, from 6mm to 63mm with standard stokes up to 1000mm. The 5 different model variations offer widest application choice. Auto switches are integrated as standard.
The transfer line moves the wafer through a series of chambers for processing. In each chamber the vacuum and atmosphere are divided by either a XGT slit valve or XGD door valve. As the wafer moves between chambers, the chamber is exhausted with a vacuum pump in order to maintain vacuum pressure. Vacuum pressure is precisely monitored by the ZSE80 digital pressure switch. Wafer transfer inside the transfer chamber is enabled via a CYV vacuum rodless cylinder.
Process Chamber Exhaust Line
XLH Manual High Vacuum Angle Valve
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
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The process chamber exhaust line has an XLH manual high vacuum angle valve between a dry vacuum pump and a turbo-molecular pump. There is another XLC high vacuum double acting angle valve between the turbo-molecular pump and the process chamber. When these valves are closed, vacuum is maintained in the process chamber and maintenance can be performed on the pumps. The process “reaction” gas can also be introduced to the process chamber by closing these valves.
Load-lock Chamber Exhaust Line
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XLA High Vacuum Angle Valve
Series XLA are high vacuum angle valves for use in industrial applications employing high vacuum and process gases. Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. XLA valves are single-acting, normally closed, with a bellows seal over the shaft and spring. The vavle opens when pressure is applied at the pilot port. The bellows assembly can be replaced, reducing maintenance costs and waste materials. The valve body is hard anodized A6063 aluminum, with 304 stainless steel valves and bellows. Numerous seal materials are available for a wide range of chmical compatibility.
Product with ID: "162983" not found.
The load-lock chamber exhaust line is used to evacuate the transfer and load-lock chambers. The load-lock chamber is restored to atmospheric pressure temporarily while a wafer is introduced. After introduction of the wafer, air is exhausted with a dry vacuum pump. When the pressure is reduced to a certain point, the turbo-molecular pump is used for exhaust. A bypass circuit is provided with an XLD high vacuum smooth exhaust valve and a high vacuum angle valve (XLA / XLF).
High Purity Fluoropolymer
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LVQ 2 Port Chemical Valve
Series LVQ is a 2 port chemical valve with a non-metallic exterior. A high density PVDF housing offers increased chemical resistance and the special diaphragm construction insures gentle opening and closing preventing the formation of micro-bubbles. The LVQ guide ring eliminates lateral motion of the poppet, which reduces internal leakage.
PA3300 Process Pump
Series PA is a double acting, compact, large capacity diaphragm pump suitable for transfer and recovery of a wide variety of fluids. The PA series is available in 3 types; automatically operated, air operated or automatically operated with a built-in pulsation attenuator.