XLF Aluminum High Vacuum Angle Valve Normally Closed O-ring Seal
XLF, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal
XLF is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal. The XL* family shares common features with all series members. Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion. A low sputtering yield and the absence of heavy metals avoid wafer contamination.
Air pressure applied to pilot port shifts opens piston-coupled valve
Numerous maintenance parts available to extend useful life of valve
Standard FKM seals, plus 8 additional seal compound options
Auto switches mountable from 4-directions
Optional 100°C to 150°C heaters (UL compliant lead wire)
